摘 要
超精密加工技术作为现代制造领域的核心技术之一，在微纳制造中发挥着至关重要的作用，其发展直接推动了光学、半导体、生物医疗等高技术产业的进步。本研究以微纳制造对高精度表面和复杂结构的需求为背景，旨在探索超精密加工技术在微纳尺度下的应用潜力及其关键科学问题。通过结合多物理场仿真与实验验证，提出了一种基于原子力调控的新型超精密加工方法，该方法能够实现亚纳米级的表面粗糙度和微米至纳米尺度的结构精度。研究结果表明，所提出的加工方法不仅显著提升了加工效率，还有效解决了传统工艺中材料去除不均匀和表面损伤等问题。此外，通过对不同材料体系（如硬脆材料和金属材料）的加工特性进行系统分析，揭示了材料去除机制与加工参数之间的内在关联，为优化工艺参数提供了理论依据。
关键词：超精密加工技术 微纳制造 原子力调控
Abstract
As one of the core technologies in the field of modern manufacturing, ultra-precision machining technology plays a vital role in micro-nano manufacturing, and its development has directly promoted the progress of high-tech industries such as optics, semiconductor and bio-medical treatment. Against the background of the demand for high-precision surfaces and complex structures, the present study aims to explore the application potential of ultra-precision machining technology at micro-nano scale and its key scientific problems. By combining multi-physical field simulation and experimental verification, a novel ultra-precision machining method based on atomic force regulation is proposed to achieve surface roughness at sub-nanometer scale and structure accuracy from micrometer to nanometer scale. The results show that the proposed processing method not only significantly improves the processing efficiency, but also effectively solves the problems of uneven material removal and surface damage in the traditional process. In addition, through the systematic analysis of the processing characteristics of different material systems (such as hard and brittle materials and me tal materials), it reveals the internal correlation between the material removal mechanism and the processing parameters, which provides a theoretical basis for optimizing the process parameters.
Keyword:Ultra-Precision Machining Technology Micro-Nano Manufacturing Atomic Force Regulation
目 录
引言 1
1超精密加工技术概述 1
1.1超精密加工技术定义与分类 1
1.2关键技术发展历程 2
1.3核心设备与工具分析 2
1.4技术性能评价标准 3
2微纳制造对超精密加工的需求 3
2.1微纳制造的基本特征 3
2.2超精密加工在微纳制造中的作用 4
2.3关键工艺需求分析 4
2.4材料适应性研究 4
3超精密加工技术在微纳制造中的应用 5
3.1光学元件的超精密加工 5
3.2半导体器件制造技术 5
3.3生物医学器件加工案例 6
3.4纳米结构表面处理技术 6
4超精密加工技术的挑战与优化策略 7
4.1加工精度提升方法 7
4.2表面质量控制技术 7
4.3高效加工工艺开发 8
4.4未来发展方向探讨 8
结论 8
参考文献 10
致谢 11
