摘 要
超精密加工技术作为现代制造业的核心领域之一，对推动高端装备制造和高新技术发展具有重要意义，然而加工过程中的误差问题始终是制约其精度提升的关键瓶颈。为解决这一难题，本研究聚焦于超精密加工中的误差补偿与精度提升策略，旨在通过系统化的理论分析与实验验证，提出一种集成化误差补偿方法以显著提高加工精度。研究首先对超精密加工中常见的热变形、机床几何误差及动态误差等进行了全面分析，并构建了基于多源数据融合的误差建模框架。在此基础上，提出了一种结合人工智能算法与传统控制理论的混合误差补偿模型，该模型能够实时监测并修正加工过程中的动态误差，从而实现高精度的稳定输出。通过设计并实施一系列对比实验，结果表明所提出的补偿方法可将加工误差降低约35%，显著提升了工件表面质量和尺寸精度。
关键词：超精密加工 误差补偿 混合模型
Abstract
As one of the core fields of modern manufacturing industry, ultra-precision machining technology is of great significance to promote the development of high-end equipment manufacturing and high-tech technology. However, the error in the processing process is always the key bottleneck restricting the improvement of its accuracy. In order to solve this problem, this study focuses on the error compensation and precision improvement strategy in ultra-precision machining, aiming to propose an integrated error compensation method to significantly improve the machining accuracy through systematic theoretical analysis and experimental verification. The paper first analyzes the common thermal deformation, machine tool geometric error and dynamic error in ultra-precision machining, and constructs an error modeling fr amework based on multi-source data fusion. Based on this, a hybrid error compensation model combining artificial intelligence algorithm and traditional control theory is proposed, which can monitor and correct the dynamic error in the processing process in real time, so as to realize the stable output with high precision. By designing and implementing a series of comparative experiments, the results show that the proposed compensation method can reduce the processing error by about 35%, and significantly improve the surface quality and dimensional accuracy of the workpiece.
Keyword:Ultra-Precision Machining Error Compensation Hybrid Model
目 录
1绪论 1
1.1超精密加工的研究背景与意义 1
1.2国内外误差补偿研究现状分析 1
1.3本文研究方法与技术路线 2
2超精密加工误差来源与特性分析 2
2.1加工设备的系统性误差分析 2
2.2环境因素对加工精度的影响 3
2.3材料特性引起的误差机制 3
2.4误差来源的综合评估方法 3
3误差补偿技术在超精密加工中的应用 4
3.1基于传感器的实时误差监测 4
3.2数学建模与误差预测方法 5
3.3补偿算法的设计与优化策略 5
3.4实验验证与结果分析 6
4超精密加工精度提升的关键技术研究 6
4.1高精度控制系统的设计与实现 6
4.2工艺参数优化对精度的影响 7
4.3表面质量控制与改进措施 7
4.4精度提升的技术集成与实践 7
结论 8
参考文献 9
致谢 10
