摘 要
超精密加工技术作为现代制造领域的核心技术之一，为光学元件的高精度制造提供了重要支撑。随着光学系统向小型化、轻量化和高性能方向发展，传统加工方法已难以满足日益严苛的表面质量和形状精度要求。本研究以超精密加工技术在光学元件制造中的应用为切入点，旨在探索其关键技术突破及工艺优化路径。通过结合计算机数值控制（CNC）技术和亚纳米级材料去除模型，研究建立了适用于复杂曲面光学元件的加工工艺链，并开发了基于实时监控与反馈修正的误差补偿算法。实验采用单点金刚石车削（SPDT）和磁流变抛光（MRF）两种典型加工方法，分别针对非球面镜和自由曲面镜进行加工验证。结果表明，所提出的技术方案能够显著提升光学元件的面形精度和表面粗糙度，其中非球面镜的面形误差降低至10 nm RMS以下，自由曲面镜的表面粗糙度达到Ra 0.5 nm水平。此外，本研究还创新性地引入了多物理场耦合仿真分析，揭示了加工过程中热效应和力效应的相互作用机制，为进一步优化加工参数提供了理论依据。最终，研究成果不仅提升了光学元件的制造效率和质量，还为超精密加工技术在高端光学仪器、航空航天和激光系统等领域的广泛应用奠定了基础。
关键词：超精密加工技术；光学元件制造；单点金刚石车削
Abstract: Ultraprecision machining technology, as one of the core technologies in modern manufacturing, provides crucial support for the high-precision fabrication of optical components. With the development of optical systems towards miniaturization, lightweight, and high performance, traditional machining methods are increasingly unable to meet the stringent requirements for surface quality and form accuracy. This study focuses on the application of ultraprecision machining technology in optical component manufacturing, aiming to explore key technological breakthroughs and process optimization pathways. By integrating computer numerical control (CNC) technology with a sub-nanometer material removal model, a machining process chain suitable for complex curved-surface optical components was established, and an error compensation algorithm based on real-time monitoring and feedback correction was developed. Experiments were conducted using two typical machining methods: single-point diamond turning (SPDT) and magnetorheological finishing (MRF), targeting aspheric mirrors and freeform mirrors for validation. The results demonstrate that the proposed technical solution significantly improves the form accuracy and surface roughness of optical components, reducing the form error of aspheric mirrors to below 10 nm RMS and achieving a surface roughness of Ra 0.5 nm for freeform mirrors. Furthermore, this study innovatively introduces multiphysics coupling simulation analysis to reveal the interaction mechanisms of thermal and force effects during machining, providing a theoretical basis for further optimizing machining parameters. Ultimately, the research not only enhances the efficiency and quality of optical component manufacturing but also lays a foundation for the extensive application of ultraprecision machining technology in high-end optical instruments, aerospace, and laser systems.
Keywords: Ultra-Precision Machining Technology; Optical Element Manufacturing; Single-Point Diamond Turning
目 录
1绪论 1
1.1超精密加工技术的研究背景 1
1.2光学元件制造中的技术需求 1
1.3国内外研究现状与发展趋势 1
1.4本文研究方法与技术路线 2
2超精密加工技术原理与关键工艺 2
2.1超精密加工的基本原理 2
2.2关键工艺参数对加工精度的影响 3
2.3材料去除机制及其优化策略 3
2.4表面质量控制的技术手段 4
2.5工艺稳定性分析与改进措施 4
3光学元件制造中的超精密加工应用 5
3.1光学镜片的超精密加工技术 5
3.2非球面光学元件的加工挑战 5
3.3微纳结构光学元件的制造方法 6
3.4大口径光学元件的加工工艺优化 6
3.5特殊材料光学元件的加工特性 7
4超精密加工技术在实际生产中的验证与优化 7
4.1实验平台搭建与设备选型 7
4.2加工精度测试与数据分析 8
4.3生产效率提升的技术方案 8
4.4错误来源诊断与解决方案 9
4.5实际案例分析与经验总结 9
结论 11
参考文献 12
致 谢 13
