摘 要
随着现代工业对高精度、高性能零部件需求的不断增长，微纳加工技术在机械制造领域的重要性日益凸显。本研究旨在探索微纳加工技术在机械制造中的应用潜力及其关键技术问题，以满足精密制造对表面质量和功能特性的严格要求。研究通过结合理论分析与实验验证，重点探讨了基于超精密车削、激光直写和纳米压印等典型微纳加工方法的工艺特性及优化策略。通过对材料去除机理、加工参数影响规律以及表面形貌控制的研究，建立了适用于不同应用场景的微纳加工模型，并提出了一种集成多物理场仿真与实时监测的工艺优化方法。实验结果表明，所提出的优化方法能够显著提高加工精度和效率，同时降低表面缺陷的发生率。此外，本研究还开发了一种新型复合微纳结构制造工艺，实现了复杂几何特征的高效加工，为功能性表面的设计与制造提供了新的技术途径。总体而言，本研究不仅深化了对微纳加工技术本质的理解，还为推动其在高端装备制造领域的实际应用奠定了重要基础，具有显著的学术价值和工程意义。
关键词：微纳加工技术；超精密车削；激光直写；纳米压印
Abstract
With the growing demand for high-precision and high-performance components in modern industry, the significance of micro-nano manufacturing technology in mechanical engineering is becoming increasingly prominent. This study aims to explore the application potential and key technical challenges of micro-nano manufacturing technologies in mechanical fabrication to meet the stringent requirements for surface quality and functional characteristics in precision manufacturing. By integrating theoretical analysis with experimental validation, the research focuses on the process characteristics and optimization strategies of representative micro-nano manufacturing methods, including ultraprecision turning, laser direct writing, and nanoimprint lithography. Through investigations into material removal mechanisms, the influence of processing parameters, and surface morphology control, micro-nano manufacturing models applicable to various application scenarios were established, and an integrated process optimization method combining multiphysics simulation and real-time monitoring was proposed. Experimental results demonstrate that the proposed optimization approach significantly enhances processing accuracy and efficiency while reducing the occurrence rate of surface defects. Furthermore, a novel composite micro-nano structure manufacturing process was developed, enabling efficient fabrication of complex geometrical features and providing new technological pathways for the design and manufacture of functional surfaces. Overall, this study not only deepens the understanding of the fundamental nature of micro-nano manufacturing technologies but also lays an important foundation for promoting their practical applications in advanced equipment manufacturing, exhibiting significant academic value and engineering implications.
Keywords：Micro-Nano Fabrication Technology；Ultra-Precision Turning；Laser Direct Writing；Nano Imprint
目 录
摘 要 I
Abstract II
引 言 1
第一章 微纳加工技术概述 2
1.1 微纳加工技术定义与分类 2
1.2 微纳加工技术的发展历程 2
1.3 微纳加工技术的关键特征 3
第二章 机械制造中的微纳加工原理 4
2.1 微纳加工的基本物理机制 4
2.2 机械制造中微纳尺度效应分析 4
2.3 微纳加工精度的影响因素 5
2.4 微纳加工材料去除机理 5
第三章 微纳加工技术的核心工艺研究 7
3.1 光刻技术在微纳加工中的应用 7
3.2 离子束加工的工艺特点 7
3.3 激光微纳加工技术的研究进展 8
3.4 超精密机械加工的技术实现 8
第四章 微纳加工技术在机械制造中的挑战与优化 10
4.1 表面质量控制的技术难点 10
4.2 高效微纳加工设备的开发方向 10
4.3 微纳加工过程中的热效应管理 11
4.4 多尺度集成制造的技术路径 11
结 论 13
参考文献 14
致 谢 15
随着现代工业对高精度、高性能零部件需求的不断增长，微纳加工技术在机械制造领域的重要性日益凸显。本研究旨在探索微纳加工技术在机械制造中的应用潜力及其关键技术问题，以满足精密制造对表面质量和功能特性的严格要求。研究通过结合理论分析与实验验证，重点探讨了基于超精密车削、激光直写和纳米压印等典型微纳加工方法的工艺特性及优化策略。通过对材料去除机理、加工参数影响规律以及表面形貌控制的研究，建立了适用于不同应用场景的微纳加工模型，并提出了一种集成多物理场仿真与实时监测的工艺优化方法。实验结果表明，所提出的优化方法能够显著提高加工精度和效率，同时降低表面缺陷的发生率。此外，本研究还开发了一种新型复合微纳结构制造工艺，实现了复杂几何特征的高效加工，为功能性表面的设计与制造提供了新的技术途径。总体而言，本研究不仅深化了对微纳加工技术本质的理解，还为推动其在高端装备制造领域的实际应用奠定了重要基础，具有显著的学术价值和工程意义。
关键词：微纳加工技术；超精密车削；激光直写；纳米压印
Abstract
With the growing demand for high-precision and high-performance components in modern industry, the significance of micro-nano manufacturing technology in mechanical engineering is becoming increasingly prominent. This study aims to explore the application potential and key technical challenges of micro-nano manufacturing technologies in mechanical fabrication to meet the stringent requirements for surface quality and functional characteristics in precision manufacturing. By integrating theoretical analysis with experimental validation, the research focuses on the process characteristics and optimization strategies of representative micro-nano manufacturing methods, including ultraprecision turning, laser direct writing, and nanoimprint lithography. Through investigations into material removal mechanisms, the influence of processing parameters, and surface morphology control, micro-nano manufacturing models applicable to various application scenarios were established, and an integrated process optimization method combining multiphysics simulation and real-time monitoring was proposed. Experimental results demonstrate that the proposed optimization approach significantly enhances processing accuracy and efficiency while reducing the occurrence rate of surface defects. Furthermore, a novel composite micro-nano structure manufacturing process was developed, enabling efficient fabrication of complex geometrical features and providing new technological pathways for the design and manufacture of functional surfaces. Overall, this study not only deepens the understanding of the fundamental nature of micro-nano manufacturing technologies but also lays an important foundation for promoting their practical applications in advanced equipment manufacturing, exhibiting significant academic value and engineering implications.
Keywords：Micro-Nano Fabrication Technology；Ultra-Precision Turning；Laser Direct Writing；Nano Imprint
目 录
摘 要 I
Abstract II
引 言 1
第一章 微纳加工技术概述 2
1.1 微纳加工技术定义与分类 2
1.2 微纳加工技术的发展历程 2
1.3 微纳加工技术的关键特征 3
第二章 机械制造中的微纳加工原理 4
2.1 微纳加工的基本物理机制 4
2.2 机械制造中微纳尺度效应分析 4
2.3 微纳加工精度的影响因素 5
2.4 微纳加工材料去除机理 5
第三章 微纳加工技术的核心工艺研究 7
3.1 光刻技术在微纳加工中的应用 7
3.2 离子束加工的工艺特点 7
3.3 激光微纳加工技术的研究进展 8
3.4 超精密机械加工的技术实现 8
第四章 微纳加工技术在机械制造中的挑战与优化 10
4.1 表面质量控制的技术难点 10
4.2 高效微纳加工设备的开发方向 10
4.3 微纳加工过程中的热效应管理 11
4.4 多尺度集成制造的技术路径 11
结 论 13
参考文献 14
致 谢 15
