摘 要
超精密加工技术作为现代制造业的核心支柱之一，在航空航天、光学器件和医疗器械等领域具有不可替代的作用，而主轴精度作为超精密机床性能的关键指标，直接影响工件的表面质量和加工精度。为满足高精度加工需求，本研究聚焦于超精密加工机床主轴精度提升技术，旨在通过系统分析与优化设计，解决主轴热变形、动态误差及装配偏差等问题。研究采用理论建模、仿真分析与实验验证相结合的方法，首先建立了主轴系统的多物理场耦合模型，揭示了温度场、应力场与振动特性对主轴精度的影响机制；其次，提出了一种基于主动热补偿与结构优化的综合控制策略，有效降低了主轴热膨胀和不平衡效应；此外，开发了高精度在线监测系统，实现了主轴动态误差的实时采集与反馈校正。
关键词：超精密加工 主轴精度 热补偿
Abstract
Ultra-precision machining technology, as one of the core pillars of modern manufacturing, plays an irreplaceable role in fields such as aerospace, optical components, and medical devices. The spindle accuracy, a key indicator of ultra-precision machine tool performance, directly affects the surface quality and machining accuracy of workpieces. To meet high-precision machining requirements, this study focuses on improving the spindle accuracy of ultra-precision machining machines. It aims to address issues such as spindle thermal deformation, dynamic errors, and assembly deviations through systematic analysis and optimized design. The research combines theoretical modeling, simulation analysis, and experimental verification. First, it establishes a multi-physics coupled model of the spindle system, revealing the mechanisms by which temperature fields, stress fields, and vibration characteristics influence spindle accuracy. Second, it proposes a comprehensive control strategy based on active thermal compensation and structural optimization, effectively reducing spindle thermal expansion and imbalance effects. Additionally, a high-precision online monitoring system is developed to achieve real-time collection and feedback correction of spindle dynamic errors.
Keyword:Ultra-Precision Machining Spindle Accuracy Thermal Compensation
目 录
引言 1
1主轴精度影响因素分析 1
1.1主轴结构设计对精度的影响 1
1.2材料特性与热变形分析 2
1.3振动对主轴精度的作用机制 2
1.4环境因素对主轴精度的干扰 3
2主轴精度提升关键技术研究 3
2.1高精度轴承选型与优化 3
2.2动平衡技术在主轴中的应用 3
2.3主轴冷却系统的设计改进 4
2.4智能控制技术在主轴精度中的作用 4
3主轴精度检测与评估方法 5
3.1主轴精度检测技术现状 5
3.2在线监测系统的开发与应用 5
3.3数据采集与处理方法研究 5
3.4误差补偿算法的研究进展 6
3.5主轴精度评估标准体系 6
4主轴精度提升案例与验证分析 7
4.1典型超精密机床主轴案例分析 7
4.2主轴精度提升方案的设计与实施 7
4.3实验测试与数据对比分析 7
4.4提升效果的长期稳定性验证 8
结论 8
参考文献 10
致谢 11
