摘要
微机电系统（MEMS）技术的快速发展为生物医学领域提供了前所未有的创新工具，其微型化、集成化和高灵敏度特性使其在疾病诊断、治疗监测及生物传感等方面展现出巨大潜力本研究旨在探索MEMS技术在生物医学中的具体应用及其优化策略通过结合纳米制造工艺与生物医学需求，开发了一系列基于MEMS的生物传感器和微流控装置，并利用实验验证了其性能结果表明，所设计的MEMS器件能够实现对生物分子的高灵敏检测、细胞行为的实时监控以及药物筛选的高效评估此外，该研究提出了一种新型MEMS-生物界面设计方法，显著提高了设备与生物系统的兼容性与响应速度这一创新点不仅拓展了MEMS技术的应用范围，还为未来个性化医疗和精准诊疗提供了技术支持综上所述，本研究成功展示了MEMS技术在生物医学领域的实用价值，为其进一步发展奠定了理论与实践基础
关键词：微机电系统（MEMS）；生物医学应用；生物传感器；微流控装置；MEMS-生物界面设计
Abstract
The rapid development of microelectromechanical systems (MEMS) technology has provided unprecedented innovative tools for the biomedical field, where its miniaturization, integration, and high sensitivity characteristics demonstrate significant potential in disease diagnosis, treatment monitoring, and biosensing. This study aims to explore the specific applications of MEMS technology in biomedicine along with optimization strategies. By integrating nanofabrication processes with biomedical requirements, a series of MEMS-based biosensors and microfluidic devices were developed and experimentally validated for their performance. The results indicate that the designed MEMS devices can achieve highly sensitive detection of biomolecules, real-time monitoring of cellular behavior, and efficient evaluation of drug screening. Furthermore, this research proposes a novel MEMS-biological interface design approach, which substantially enhances the compatibility and response speed between the devices and biological systems. This innovation not only expands the application scope of MEMS technology but also provides technical support for future personalized medicine and precision diagnostics. In summary, this study successfully demonstrates the practical value of MEMS technology in the biomedical field, laying both theoretical and practical foundations for its further development.
Keywords：Microelectromechanical Systems (Mems); Biomedical Applications; Biosensor; Microfluidic Device; Mems-Bio Interface Design
目 录
摘要 I
Abstract II
一、绪论 1
(一) 微机电系统与生物医学的交叉背景 1
(二) 研究现状与发展趋势分析 1
(三) 本文研究方法与技术路线 2
二、微机电系统在生物传感中的应用探索 2
(一) 生物传感器的基本原理与需求 2
(二) 微机电技术在分子检测中的实现 3
(三) 高灵敏度生物传感系统的开发 3
三、微机电系统在医疗诊断中的创新实践 4
(一) 微流控芯片在疾病诊断中的作用 4
(二) 基于微机电的便携式诊断设备设计 4
(三) 医疗诊断中微机电系统的优化策略 5
四、微机电系统在治疗与监测中的前沿应用 5
(一) 微型植入设备的技术挑战与突破 5
(二) 智能药物递送系统的微机电实现 6
(三) 实时健康监测的微机电解决方案 7
结 论 8
参考文献 9
