摘 要
超精密加工机床作为现代制造业的核心装备，其热误差对加工精度的影响日益显著，尤其是在高精度和复杂零部件制造中。为解决这一问题，本研究以提升超精密加工机床的热稳定性为目标，深入探讨了热误差补偿技术的关键理论与实现方法。研究首先分析了机床热误差的产生机理及其影响因素，建立了基于有限元分析的热误差预测模型，并结合实际加工环境优化了模型参数。在此基础上，提出了一种融合多传感器数据的实时监测与补偿算法，通过温度场分布的精确测量和误差动态修正，实现了热误差的有效控制。实验结果表明，所提出的补偿技术能够显著降低机床热误差，使加工精度提升约30%以上。此外，本研究创新性地引入了人工智能算法对热误差进行智能预测与补偿，进一步提高了系统的适应性和鲁棒性。该技术不仅为超精密加工机床的热误差补偿提供了新思路，还为高端装备制造领域的精度提升奠定了重要基础，具有重要的理论价值和工程应用前景。
关键词：超精密加工机床；热误差补偿；有限元分析
Abstract: Ultra-precision machine tools, as the core equipment of modern manufacturing, are increasingly affected by thermal errors, particularly in the production of high-precision and complex components. To address this issue, this study focuses on enhancing the thermal stability of ultra-precision machine tools by exploring the key theories and implementation methods of thermal error compensation technology. Initially, the mechanisms and influencing factors of thermal errors in machine tools are analyzed, and a thermal error prediction model based on finite element analysis is established, with its parameters optimized according to actual machining conditions. Subsequently, a real-time monitoring and compensation algorithm integrating multi-sensor data is proposed, which achieves effective control of thermal errors through precise measurement of temperature field distribution and dynamic correction of errors. Experimental results demonstrate that the proposed compensation technique significantly reduces thermal errors, improving machining accuracy by approximately 30% or more. Furthermore, this research innovatively incorporates artificial intelligence algorithms for intelligent prediction and compensation of thermal errors, thereby enhancing the adaptability and robustness of the system. This technology not only provides new insights into thermal error compensation for ultra-precision machine tools but also lays an important foundation for precision improvement in advanced manufacturing equipment, showcasing significant theoretical value and engineering application potential.
Keywords: Ultra-Precision Machine Tool; Thermal Error Compensation; Finite Element Analysis
目 录
1绪论 1
1.1超精密加工机床热误差研究背景 1
1.2热误差补偿技术的研究意义 1
1.3国内外研究现状与发展趋势 1
1.4本文研究方法与技术路线 2
2热误差产生机理分析 2
2.1超精密加工机床的热源分布特征 2
2.2热传导对机床精度的影响机制 3
2.3温度场建模与仿真分析方法 3
2.4关键部件热变形特性研究 4
2.5热误差的主要表现形式 4
3热误差补偿模型构建 4
3.1补偿模型的基本原理与框架 5
3.2数据采集与温度监测系统设计 5
3.3基于数学方法的热误差预测模型 6
3.4智能算法在补偿模型中的应用 6
3.5模型验证与优化策略 7
4热误差补偿技术实现与实验研究 7
4.1补偿控制系统的设计与实现 7
4.2实验平台搭建与测试方案制定 7
4.3补偿效果评估指标体系构建 8
4.4实验数据分析与结果讨论 9
4.5技术改进方向与未来展望 9
结论 9
参考文献 11
致 谢 12
